Details
Width mm
171
Body Material
Aluminium
Height mm
66
Brand
SMC
Manufacturer
SMC
Feature
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Operation
Normally Closed
Seal Material
FKM
Seal Type
Bellows Seal
Actuation
Single acting
Series
XL2
Length mm
98
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Application
Flange Specification
Feature
Angle
Operation
Height mm
Length mm
Width mm
Ambient Temperature
Valve Material
Actuation
Actuator Working Temperature
List Price
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–
Available to Order
–
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–
–
–
Available to Order
High vacuum applications requiring minimal contamination and corrosion resistance
KF NW
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Angle valve
Normally Closed
–
–
–
–
–
Single acting
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
Normally Closed Bellows Seal
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
–
Bellows seal
Angle valve
Normally Closed
38
60
108
5 to 60°C
Aluminium
Single acting
–
Available to Order
–
–
–
–
–
–
–
–
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–
–
–
Available to Order
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–
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–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Normally Closed
–
Available to Order
–
–
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–
79
110
185
–
–
–
–
Available to Order
–
–
–
–
–
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–
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–
–
–
–
Available to Order
High vacuum applications
–
Bellows seal
–
Normally Closed
–
–
–
–
–
Single acting
–
Available to Order
High Vacuum
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
Normally Closed Bellows Seal
–
–
–
–
–
–
–
Available to Order
High Vacuum
–
–
–
Normally Closed
–
–
–
–
–
–
–
Available to Order
High Vacuum
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
Normally Closed Bellows Seal
–
–
–
5 to 60°C
–
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
Normally Closed, Single Acting, Bellows Seal
–
–
–
–
–
–
5 to 60°C
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
Normally Closed Bellows Seal
–
–
–
–
–
–
–
Available to Order
High Vacuum Angle Valve
–
–
–
Normally Closed Bellows Seal
–
–
–
–
–
–
–
Available to Order


