Details
Brand
SMC
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Body Material
Seal Type
Operation
Application
Flange Specification
Series
Seal Material
Feature
Angle
Actuation
Height mm
Length mm
Width mm
Ambient Temperature
Valve Material
Actuator Working Temperature
List Price
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Available to Order
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Available to Order
Aluminium
Bellows Seal
Normally Closed
High vacuum applications requiring minimal contamination and corrosion resistance
KF NW
XL2
FKM
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Angle valve
Single acting
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Available to Order
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Available to Order
Aluminium
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Normally Closed Bellows Seal
–
–
XL2
FKM
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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Available to Order
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Available to Order
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Available to Order
Aluminium
–
Normally Closed
High vacuum angle valve for semiconductor and vacuum applications
–
XL2
FKM
Bellows seal
Angle valve
Single acting
38
60
108
5 to 60°C
Aluminium
–
Available to Order
Aluminium
–
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–
XL2
FKM
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Available to Order
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Available to Order
Aluminium
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XL2
FKM
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Normally Closed
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Available to Order
Aluminium
–
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XL2
FKM
–
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79
110
185
–
–
–
Available to Order
Aluminium
–
Normally Closed
High vacuum applications
–
XL2
FKM
Bellows seal
–
Single acting
–
–
–
–
–
–
Available to Order
Aluminium
–
Normally Closed Bellows Seal
High Vacuum
–
XL2
FKM
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
–
–
–
–
–
Available to Order
Aluminium
Bellows Seal
Normally Closed
High Vacuum
–
XL2
FKM
–
–
–
–
–
–
–
–
–
Available to Order
Aluminium
–
Normally Closed Bellows Seal
High Vacuum
–
XL2
FKM
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
–
–
5 to 60°C
–
–
Available to Order
Aluminium
–
Normally Closed, Single Acting, Bellows Seal
High vacuum angle valve for semiconductor and vacuum applications
–
XL2
FKM
–
–
–
–
–
–
–
–
5 to 60°C
Available to Order
Aluminium
–
Normally Closed Bellows Seal
High vacuum angle valve for semiconductor and vacuum applications
–
XL2
FKM
–
–
–
–
–
–
–
–
–
Available to Order
Aluminium
–
Normally Closed Bellows Seal
High Vacuum Angle Valve
–
XL2
FKM
–
–
–
–
–
–
–
–
–
Available to Order
Aluminium
Bellows Seal
–
High vacuum angle valve for semiconductor and vacuum applications
–
XL2
FKM
–
–
Normally Closed
–
–
–
–
–
–
Available to Order


