SMC High Vacuum Angle Valve
Product Code: XLA-16G-2-XF1A...
Available to Order
tech sheet
Details
Body Material
Aluminium
Brand
SMC
Flange Specification
KF NW
Angle
Angle valve
Manufacturer
SMC
Operation
Normally Closed
Application
High vacuum applications requiring minimal contamination and corrosion resistance
Seal Material
FKM
Seal Type
Bellows Seal
Actuation
Single acting
Feature
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Series
XL2
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Feature
Operation
Height mm
Length mm
Application
Width mm
Ambient Temperature
Valve Material
Actuation
Actuator Working Temperature
List Price
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
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Bellows seal
Normally Closed
38
60
High vacuum angle valve for semiconductor and vacuum applications
108
5 to 60°C
Aluminium
Single acting
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Normally Closed
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Available to Order
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110
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185
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Available to Order
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Available to Order
Bellows seal
Normally Closed
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High vacuum applications
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Single acting
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Available to Order
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
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High Vacuum
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Available to Order
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Normally Closed
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High Vacuum
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Available to Order
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
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High Vacuum
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5 to 60°C
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Available to Order
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Normally Closed, Single Acting, Bellows Seal
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High vacuum angle valve for semiconductor and vacuum applications
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5 to 60°C
Available to Order
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Normally Closed Bellows Seal
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High vacuum angle valve for semiconductor and vacuum applications
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–
–
Available to Order
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Normally Closed Bellows Seal
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High Vacuum Angle Valve
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
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Normally Closed
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Available to Order