SMC High Vacuum Angle Valve
Product Code: XLA-63G-2M9//...
Available to Order
tech sheet
Details
Body Material
Aluminium
Brand
SMC
Operation
Normally Closed Bellows Seal
Manufacturer
SMC
Application
High vacuum angle valve for semiconductor and vacuum applications
Seal Material
FKM
Series
XL2
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Seal Type
Operation
Application
Flange Specification
Feature
Angle
Actuation
Height mm
Length mm
Width mm
Ambient Temperature
Valve Material
Actuator Working Temperature
List Price
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Bellows Seal
Normally Closed
High vacuum applications requiring minimal contamination and corrosion resistance
KF NW
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Angle valve
Single acting
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Normally Closed Bellows Seal
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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Available to Order
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Normally Closed
High vacuum angle valve for semiconductor and vacuum applications
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Bellows seal
Angle valve
Single acting
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60
108
5 to 60°C
Aluminium
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Normally Closed
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185
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Normally Closed
High vacuum applications
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Bellows seal
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Single acting
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Available to Order
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Normally Closed Bellows Seal
High Vacuum
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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Available to Order
Bellows Seal
Normally Closed
High Vacuum
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Available to Order
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Normally Closed Bellows Seal
High Vacuum
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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5 to 60°C
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Available to Order
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Normally Closed, Single Acting, Bellows Seal
High vacuum angle valve for semiconductor and vacuum applications
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5 to 60°C
Available to Order
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Normally Closed Bellows Seal
High Vacuum Angle Valve
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Available to Order
Bellows Seal
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High vacuum angle valve for semiconductor and vacuum applications
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Normally Closed
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Available to Order