Details
Body Material
Aluminium
Brand
SMC
Manufacturer
SMC
Feature
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Application
High vacuum angle valve for semiconductor and vacuum applications
Valve Material
Aluminium
Actuation
Normally Closed
Seal Material
FKM
Length mm
74
Seal Type
Bellows Seal
Height mm
48
Width mm
121
Series
XL2
Specification
SMC High Vacuum Angle Valve, SMC
