Details
Body Material
Aluminium
Brand
SMC
Manufacturer
SMC
Feature
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Application
High vacuum angle valve for semiconductor and vacuum applications
Valve Material
Aluminium
Actuation
Normally Closed
Seal Material
FKM
Length mm
74
Seal Type
Bellows Seal
Height mm
48
Width mm
121
Series
XL2
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Operation
Application
Flange Specification
Feature
Angle
Actuation
Height mm
Length mm
Width mm
Ambient Temperature
Actuator Working Temperature
List Price
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Available to Order
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Available to Order
Normally Closed
High vacuum applications requiring minimal contamination and corrosion resistance
KF NW
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Angle valve
Single acting
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Available to Order
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Available to Order
Normally Closed Bellows Seal
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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Available to Order
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Available to Order
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Available to Order
Normally Closed
High vacuum angle valve for semiconductor and vacuum applications
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Bellows seal
Angle valve
Single acting
38
60
108
5 to 60°C
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Available to Order
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Available to Order
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Available to Order
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Normally Closed
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Available to Order
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79
110
185
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Available to Order
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Available to Order
Normally Closed
High vacuum applications
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Bellows seal
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Single acting
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Available to Order
Normally Closed Bellows Seal
High Vacuum
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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–
–
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Available to Order
Normally Closed
High Vacuum
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Available to Order
Normally Closed Bellows Seal
High Vacuum
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
–
–
5 to 60°C
–
Available to Order
Normally Closed, Single Acting, Bellows Seal
High vacuum angle valve for semiconductor and vacuum applications
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5 to 60°C
Available to Order
Normally Closed Bellows Seal
High vacuum angle valve for semiconductor and vacuum applications
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Available to Order
Normally Closed Bellows Seal
High Vacuum Angle Valve
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Available to Order


