SMC Slit Valve
Product Code: XGT223-46236-1F...
Available to Order
tech sheet
Details
Series
XGT
Brand
SMC
Application
Partition valve between load lock chamber and transfer chamber and between transfer chamber and process chamber in semiconductor manufacturing equipment
Accessories
Gasket with wiper for bellows protection Rubber cushions for impact absorption End lock mechanism
Model
XGT223-46236-1F
Manufacturer
SMC
Valve Material
FKM (Gate O-ring Material)
Specification
SMC Slit Valve, SMC
Additional Variants
Product Name
Product Code
Material
Actuation
List Price
Gate O-ring FKM
Cassette Type Standard
Available to Order