SMC Slit Valve
Product Code: XGT222-46236-1F...
Available to Order
tech sheet
Details
Series
XGT
Brand
SMC
Application
Partition valve between load lock chamber and transfer chamber and between transfer chamber and process chamber in semiconductor manufacturing equipment
Manufacturer
SMC
Material
Gate O-ring FKM
Actuation
Cassette Type Standard
Specification
SMC Slit Valve, SMC
Additional Variants
Product Name
Product Code
Model
Accessories
Valve Material
List Price
XGT223-46236-1F
Gasket with wiper for bellows protection Rubber cushions for impact absorption End lock mechanism
FKM (Gate O-ring Material)
Available to Order